Ultrafast atomic layer deposition - SoLayTec

Ultrafast atomic layer deposition - SoLayTec

Ultrafast atomic layer deposition - SoLayTec

(Klikken: 96;website toegevoegd: Mar 30, 2015)

Beschrijving:

Leading research institutes recently reported about the superior solar cell passivation properties of thin aluminum oxide layers grown by Atomic Layer Deposition (ALD). Yet, so far no cost-effective production tool was available for high-volume ALD de