Ultrafast atomic layer deposition - SoLayTec
(Klikken: 96;website toegevoegd: Mar 30, 2015)
- KOPPELING: solaytek.nl
- Land: Nederland
- trefwoord 1: solaytec
- trefwoord 2: high
- trefwoord 3: speed
- trefwoord 4: spatial
- trefwoord 5: atmospheric
- trefwoord 6: atomic
- trefwoord 7: layer
- trefwoord 8: deposition
- trefwoord 10: solar
Beschrijving:
Leading research institutes recently reported about the superior solar cell passivation properties of thin aluminum oxide layers grown by Atomic Layer Deposition (ALD). Yet, so far no cost-effective production tool was available for high-volume ALD de